Beschreibung
- Auto Refill Formic Acid Bubbler
- Formic Exhaust Abatement System
- Real Time Formic Acid Concentration and O2 PPM Monitoring
- Formic Acid and Carbon Monoxide Safety Sensors
- SEMI S2/S8 Compliant
Technische Daten
| Oven Length | 678cm |
| Heated Zones | 13 Top / 13 Bottom |
| Total Heated Length | 430 cm |
| Cool Zones | 3 Top (Bottom Option) |
| Max Working Temperature | Standard: 350°C Option: 400°C |
| Cleanroom Option | Down to Class 1000 |
| Formic Acid Stability in Soak Zone | +/- 1% |
