Beschreibung
- Auto Refill Formic Bubbler
- Formic Exhaust Abatement System
- Real Time Formic Acid Concentration and O2 PPM Monitoring
- Formic Acid and Carbon Monoxide Safety Sensors
- SEMI S2/S8 Compliant
Technische Daten
Oven Length | 590cm |
Heated Zones | 10 Top / 10 Bottom |
Total Heated Length | 348 cm |
Cool Zones | 3 Top (Bottom Option) |
Max Working Temperature | Standard: 350°C Option: 400°C |
Cleanroom Option | Down to Class 1000 |
Formic Acid Stability in Soak Zone | +/- 1% |